Journal
MICROELECTRONIC ENGINEERING
Volume 57-8, Issue -, Pages 775-780Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(01)00485-3
Keywords
laser ablation; 3D structuring; embossing; micro structuring
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A high precision laser ablation machine for 3D structuring has been developed. Laser processing of hard metals and ceramics with UV light (355 mn) was studied and optimised with respect to surface quality. It could be shown that the surface smoothness of the structures produced by laser ablation in metals is equal to that produced by high quality electric discharge milling (EDM). Furthermore, laser ablation is not only restricted to metals. (C) 2001 Elsevier Science BY All rights reserved.
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