4.5 Article

Micromachined acoustic-wave liquid ejector

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 10, Issue 3, Pages 442-449

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/84.946804

Keywords

acoustic waves; ejector; Fresnel half-wave band (FHWB) sources; ink jet printing; piezoelectric; self-focusing

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This paper describes the design and performance of micromachined, self-focusing acoustic-wave liquid ejector (AWLE) that requires no heat, nozzle, nor acoustic lens. The AWLE has a very simple device structure and is easy to fabricate. Three versions of AWLE have been designed, fabricated, and tested for an ink-jet printing application. Also developed are computer simulation and design aids that take into account the acoustic loss in water and the two-time wave reflections at the water-air and water-transducer interfaces. The AWLE has been observed to eject water droplets of about 5 mum in diameter with radio frequency (RF) pulses of 5 mus pulsewidth. Overall, the AWLE has been shown to be capable of improving the printing resolution and speed of an ink-jet printing significantly.

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