Fluidic microsystems based on printed circuit board technology

In this paper, fluidic microsystems based on an alternative fabricating technology are described. This technology mainly utilizes the manufacturing principles of printed circuit boards (PCBs). Minimal lateral structure dimensions of approximately 100 mum und vertical dimensions of some 10 mum are feasible. By introducing thin polymeric foils (6-13 mum in thickness) into a stack of PCBs, movable parts forming active or passive valves, pumps or sensors can be produced. The first results concerning several fluidic components based on PCB technology are presented.