Journal
JOURNAL OF MATERIALS RESEARCH
Volume 16, Issue 10, Pages 2810-2816Publisher
SPRINGER HEIDELBERG
DOI: 10.1557/JMR.2001.0387
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Dielectric response of mesoporous silica films was monitored as a function of several gas-phase chemical species. The effects of humidity, ammonia, and methane on dielectric constant and dissipation factor of films subjected to different chemical treatments are described. Dielectric constant and dissipation factor of partially dehydroxylated films were found to be highly sensitive to both water vapor and ammonia in air. The capacitive devices based on mesoporous silica films show potential for use in chemical sensors.
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