Journal
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Volume 235, Issue 1-3, Pages 174-178Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0304-8853(01)00332-8
Keywords
patterned media; electron beam lithography; reactive ion etching; magnetic force microscopy; thermal stability
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CoPt dot-arrays with dot diameters ranging 80-1000 nm have been fabricated by using electron beam lithography and reactive ion etching. The fabricated dots had their magnetic easy axes perpendicular to the plane. Dots with 80-nm-diameter were observed as single domain by magnetic force microscopy. The CoPt dot-array with 80-nm-diameter showed much higher thermal stability than continuous films. (C) 2001 Elsevier Science B.V. All rights reserved.
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