Journal
APPLIED PHYSICS B-LASERS AND OPTICS
Volume 73, Issue 5-6, Pages 603-608Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s003400100705
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High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.
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