Journal
APPLIED PHYSICS B-LASERS AND OPTICS
Volume 73, Issue 7, Pages 693-698Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s003400100730
Keywords
-
Categories
Ask authors/readers for more resources
We optimize the conversion of laser energy into extreme ultraviolet (EUV) radiation by tailoring the laser parameters for a laser-produced plasma generated from 20 mum diameter water droplets. It is shown that mass-limited targets require careful adaption of laser-pulse energy and laser-pulse duration separately, rather than laser intensity, which seems to be adequate for bulk targets. The optimal pulse duration scales with the droplet radius, and the optimal pulse energy with the droplet volume. With optimized parameters, we obtain a conversion efficiency of 0.23% in 4 pi and 2.5% bandwidth for 13 nm radiation, the future EUV lithography light.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available