3.8 Article

Application of Bessel beams for microfabrication of dielectrics by femtosecond laser

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume 40, Issue 11A, Pages L1197-L1199

Publisher

INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.40.L1197

Keywords

laser materials processing; laser-induced breakdown; ultrafast phenomena; Bessel beam; vitreous silica

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We demonstrate a novel approach to femtosecond microfabrication of transparent dielectrics, which employs nondiffracting Bessel beams instead of the conventionally used Gaussian beams. The main advantage of Bessel beams is the possibility of recording linear photomodified tracks, extending along the lines of nondiffractive beam propagation without sample translation, as would be required for Gaussian beams. Recording of patterns with an aspect ratio of up to 10(2)-10(3) in vitreous silica using amplified femtosecond Ti:saphire laser pulses is demonstrated.

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