Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 6, Issue 4, Pages 499-506Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/3516.974864
Keywords
finite element analysis; multi-DOF; ultrasonic motor; vibration
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A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Mufti-DOF position control of the rotor was achieved successfully using the proposed control method.
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