Journal
APPLIED PHYSICS LETTERS
Volume 79, Issue 24, Pages 4004-4006Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1423789
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The measured switched polarization properties of integrated Pb(Zr,Ti)O-3 (PZT) capacitors arrays have been found to show a small dependence on individual capacitor size in the range from 0.17 and 100 mum(2). These thin (90 nm) PZT capacitors have low voltage switching properties with polarization saturation of <1.8 V with switched polarization for the smallest capacitors (0.17 mum(2)) still larger than 25 muC/cm(2). The capacitor stack consisted of TiAlN hardmask/Ir/IrOx/PZT/Ir/TiAlN on either SiO2 dielectric or W plugs. The capacitor was patterned using 248 nm lithography and etched using only one mask. For wafers without W plugs, the Ir bottom electrode was not etched. For wafers with W plugs, the entire capacitor stack was etched and electrical connection to the bottom electrode was through the W plugs. The capacitors were integrated using SiO2 dielectrics and one level of Al metallization. These data suggest that high-density, ferroelectric capacitor-based memories may be feasible. (C) 2001 American Institute of Physics.
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