Journal
PHYSICAL REVIEW LETTERS
Volume 87, Issue 24, Pages -Publisher
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevLett.87.246104
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Grazing incidence x-ray scattering was used to determine the temperature and ion-energy dependence of nanoscale corrugations that form on an amorphous SiO2 surface eroded by Ar+ ions. The corrugation wavelength lambda* shows a nearly linear dependence on ion energy. Between room temperature and similar to 200 degreesC, lambda* depends weakly on temperature and above similar to 200 degreesC it shows an Arrhenius-like increase. Ion-assisted viscous relaxation in a thin surface layer is shown to be the dominant smoothing process during erosion; the rate of viscous smoothing scales as (lambda*)(-4).
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