Journal
THIN SOLID FILMS
Volume 401, Issue 1-2, Pages 216-224Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(01)01479-1
Keywords
titanium oxide; optical properties; quantum effects; structural properties
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The optical parameters of crystalline anatase and polycrystalline anatase films prepared by reactive magnetron sputtering were examined by spectroscopic ellipsometry and optical transmittance spectroscopy, respectively, Some films were doped with aluminium or chromium. In general. the values of the optical band-ap for the films are consistently blue-shifted as compared with the crystal. The blue shift is also found for some films doped with Al and Cr. The width of the absorption bands is considerable narrower in the films than in the crystal. These effects are interpreted as resulting from the spatial confinement of electrons, and holes in the TiO2 microcrystallites. The average crystallite size determined from the shift of the optical gap was found to be in the range similar to5-8 nm. in excellent agreement with the data obtained from small-angle X-ray diffractometry. (C) 2001 Elsevier Science B.V All rights reserved.
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