Epitaxial ferroelectric Pb(Zr, Ti)O3 thin films on Si using SrTiO3 template layers

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr, Ti)O-3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d(33) coefficients compared to textured and untextured polycrystalline films. (C) 2002 American Institute of Physics.