Journal
APPLIED SURFACE SCIENCE
Volume 185, Issue 3-4, Pages 289-297Publisher
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DOI: 10.1016/S0169-4332(01)00982-5
Keywords
electroless deposition; copper bond pads; barrier layer; flip chip
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A low cost, selective electroless metallisation of integrated circuit (IC) copper bond pads with nickel and gold is demonstrated. This metallurgy can function as a barrier layer/bondable material when deposited as a thin layer or as the chip bump for flip chip applications when deposited to greater heights. Four alternative activation steps for selective electroless nickel deposition on bond pad copper are demonstrated. Selective low cost deposition has been achieved with a proprietary electroless plating bath developed at NMRC and three commercial baths on both sputtered copper substrates and electrolessly deposited copper on titanium nitride barrier layer material. (C) 2002 Published by Elsevier Science B.V.
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