Journal
APPLIED PHYSICS LETTERS
Volume 80, Issue 3, Pages 353-355Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1432747
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A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process. (C) 2002 American Institute of Physics.
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