High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer

We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (similar to1 J/cm(3)) of the active polymer [the electrostrictive P(VDF-TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters. (C) 2002 American Institute of Physics.