Two-dimensional lateral superlattices of nanostructures: Nonlithographic formation by anodic membrane template

A nonlithographic technique that utilizes highly ordered anodized aluminum oxide porous membrane as template is presented as a general fabrication means for the formation of an array of vastly different two-dimensional lateral superlattices structures. Hexagonal close-packed nanopore arrays were fabricated on Si, GaAs, and GaN substrates via reactive ion etching. Quantum dot arrays of various metals and semiconductors were formed through evaporation and subsequent etching. The two-dimensional lateral superlattice structures fabricated using this method are of a high level of ordering, uniformity, and packing density. The diameter and periodicity of the nanostructures are determined by the features of the original alumina membrane, which can be adjusted by varying the anodization conditions. (C) 2002 American Institute of Physics.