Journal
APPLIED PHYSICS LETTERS
Volume 80, Issue 7, Pages 1258-1260Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1449532
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The structural and electrical properties of metalorganic chemical vapor deposition-grown Pb(Zr0.35Ti0.65)O-3 thin films ranging in thickness from 700 to 4000 Angstrom have been investigated. Cross-sectional scanning electron microscopy showed that these films are columnar, with grains extending through the thickness of the film. High-resolution x-ray diffraction showed that while the thickest films are tetragonal, with reflections corresponding to a-type and c-type domains, films thinner than 1500 Angstrom are not. Electron backscatter diffraction and hysteresis loop measurements showed that the thinnest films are ferroelectric and have a rhombohedral crystal structure. (C) 2002 American Institute of Physics.
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