Journal
DIAMOND AND RELATED MATERIALS
Volume 11, Issue 3-6, Pages 672-676Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-9635(01)00619-7
Keywords
diamond growth; diamond MEMS; micro relay; micro switch
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Based on the technology of the electrostatically actuated cantilever micro switch, entirely made of diamond on a Si-baseplate (except for the final top interconnect metal level) [reported previously] and based on the static and dynamic switching characteristics [reported previously], in coplanar arrangement was designed, fabricated and successfully operated. Due to the DC-coupling the new MEMS-relay allows switching of bias and signal simultaneously. (C) 2002 Elsevier Science B.V. All rights reserved.
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