Journal
APPLIED PHYSICS LETTERS
Volume 80, Issue 10, Pages 1716-1718Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1458534
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Pulsed-laser deposition of Au thin films has been achieved by ablating a gold target with a KrF excimer Laser in various conditions of ambient Ar gas pressure (from 10(-5) to 4 Torr) and target-to-substrate distance (from 1.0 to 11 cm). The dynamics of the plasma plume were measured in the same conditions. Highly oriented Au (111) thin films are obtained for pressure-distance deposition conditions such that the neutral Au species have a typical velocity larger than 2 km s(-1), while a polycrystalline powder is obtained when the typical velocity is smaller than 0.8 km s(-1). (C) 2002 American Institute of Physics.
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