Journal
APPLIED PHYSICS LETTERS
Volume 80, Issue 13, Pages 2365-2367Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1465132
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We performed x-ray diffraction measurements by using highly brilliant synchrotron radiation on only a small region of 250-nm-thick Pb(Zr0.33Ti0.67)O-3 polycrystalline films with gold top electrodes after applying various numbers of switching cycles of the electric field. The films were deposited on Pt/SiO2/Si substrates by low-temperature metalorganic chemical vapor deposition. The plane spacing and integrated intensity of 004 and 400 diffraction patterns were plotted against the number of switching cycles. We found a good correlation between the increase in 004-plane spacing and the decrease in remanent polarization. This correlation indicates that tetragonal distortion of c domains is closely related to the fatigue phenomenon. (C) 2002 American Institute of Physics.
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