Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 299, Issue -, Pages 1219-1223Publisher
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DOI: 10.1016/S0022-3093(01)01142-5
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Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n-i-p solar cells, 'Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). respectively. The role of the substrate is thereby shown to be very critical; a change in the substrate can cause a transition from amorphous to microcrystalline growth in micrometer-thick layers. When crystalline growth occurs, the layer microstructure is depth-dependent. (C) 2002 Elsevier Science B.V. All rights reserved.
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