Journal
BIOMEDICAL MICRODEVICES
Volume 4, Issue 2, Pages 117-121Publisher
KLUWER ACADEMIC PUBL
DOI: 10.1023/A:1014683114796
Keywords
microfluidies; valves; PDMS
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This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.
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