Journal
JOURNAL DE PHYSIQUE IV
Volume 12, Issue PR4, Pages 9-16Publisher
EDP SCIENCES S A
DOI: 10.1051/jp4:20020071
Keywords
-
Categories
Ask authors/readers for more resources
In situ temperature measurement is an integral part of deposition processes and optical pyrometry is a useful technique to control the temperature of the growing film. In this work, in situ IR pyrometry has been used for real time monitoring of the early stages of the growth of metallic-type thin films selected as model system. Significant variations of the pyrometric signal were observed during MOCVD of CrCxNy films due to changes of emissivity of the film/substrate system. The pyrometric signal (or emissivity) depends predominantly on the nature, the thickness and the surface roughness of the growing film. As a result, fruitful informations as the formation of an interphase or the existence of an induction period can be obtained in real time by this technique. IR pyrometry can be used as surface diagnostic tool for a large variety of thin film materials that exhibits an emissivity sufficiently different from the substrate.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available