Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 20, Issue 4, Pages 1348-1355Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.1490387
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Kelvin probe force gradient microscopy is proposed to image and measure local dc voltage variations using the double pass method. The various voltages between sensor and sample induce electrical force gradients that change the resonance of the sensor. Images of the various phase shifts show contrasts, which, as we demonstrate, can be interpreted in terms of local changes in voltage and capacitive coupling. The interest of this method for observation and local voltage measurements is demonstrated and explained. (C) 2002 American Vacuum Society.
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