4.4 Article

Photonic bands in patterned silicon-on-insulator waveguides

Journal

IEEE JOURNAL OF QUANTUM ELECTRONICS
Volume 38, Issue 7, Pages 885-890

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JQE.2002.1017602

Keywords

modeling; optical materials; reflectometry; waveguides

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One- and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2-2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculated with an expansion on the basis of the waveguide modes.

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