Journal
SCIENCE
Volume 297, Issue 5580, Pages 376-378Publisher
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1071718
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We present spatial coherence measurements of extreme ultraviolet (EUV) light generated through the process of high-harmonic up-conversion of a femtosecond laser. With a phase-matched hollow-fiber geometry, the generated beam was found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source was shown by recording Gabor holograms of small objects. This work demonstrates the capability to perform EUV holography with a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments involving high-precision metrology, inspection of optical components for EUV lithography, and microscopy and holography with nanometer resolution. Furthermore, the short time duration of the EUV radiation ( a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.
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