Journal
MICROSYSTEM TECHNOLOGIES
Volume 8, Issue 4-5, Pages 359-362Publisher
SPRINGER-VERLAG
DOI: 10.1007/s00542-001-0160-8
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An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10-150 mum and aspect ratios of 3-10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed.
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