Journal
THIN SOLID FILMS
Volume 415, Issue 1-2, Pages 108-113Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(02)00543-6
Keywords
thin film; LiPON; PLD; solid state electrolyte
Ask authors/readers for more resources
Lithium phosphorus oxynitride (UPON) thin film as a lithium electrolyte was successfully prepared by ultraviolet (355 nm) pulsed laser deposition in an ambient N-2 gas for the first time. The ionic conductivity of the deposited LiPON film strongly depends on the laser fluence and the ambient N-2 gas pressure. AC impedance data of LiPON thin film were measured at different temperatures, and an ionic conductivity of 1.6 x 10(-6) S/cm at 25 degreesC was obtained with conductivity activation energy of 0.58 eV. The structure, composition and morphology of the deposited UPON films were characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis and X-ray photoelectron spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available