Journal
IEEE TRANSACTIONS ON MAGNETICS
Volume 38, Issue 5, Pages 2589-2591Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2002.803224
Keywords
cobalt; ion beam applications; magnetic materials; nanotechnology
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Cobalt dot arrays are fabricated by Ga+ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.
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