Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 100, Issue 2-3, Pages 264-271Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(02)00070-5
Keywords
electrostatic; microvalve; actuator
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This paper presents a novel large-stroke electrostatic valve actuator for high-pressure applications. The combination of pressure balancing and flexible electrode structures ensures large flow gaps at a low actuation voltage. A simulation tool was built to evaluate the design parameters. Design specific, as well as general optimisations are performed. The model shows a 5.6 times (theoretical) performance improvement compared to earlier designs. A micromachined test structure was fabricated and evaluated. Measurement results are presented and discussed. (C) 2002 Elsevier Science B.V. All rights reserved.
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