Incorporating zeolites in microchemical systems

Using a new fabrication method based on microelectronic fabrication and zeolite thin film technologies, MFI-type zeolites with engineered structures were incorporated as catalyst, membrane and structural material within the design architecture of a microreactor, membrane microseparator and microeletrochemical cell. Complex microchannel geometry and network (<5 mum), as well as zeolite arrays (<10 mum) were successfully fabricated onto highly orientated supported zeolite films. The zeolite micropatterns were stable even after repeated thermal cycling between 303 and 873 K for prolonged period of time. Blueprints for zeolite-based microchemical systems were presented, and test units were fabricated and the structural details of the microdevices' architecture were analysed. (C) 2002 Elsevier Science B.V. All rights reserved.