Journal
APPLIED SURFACE SCIENCE
Volume 197, Issue -, Pages 416-420Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0169-4332(02)00352-5
Keywords
thin films; subpicosecond laser; pulsed laser deposition; Er : YAG; Er : YAP
Ask authors/readers for more resources
Thin films of Er:YAG and Er:YAP were deposited by subpicosecond (450 fs) and nanosecond (20 ns) KrF laser (lambda = 248 nm) on YAG, YAP, fused silica, silicon and sapphire substrates. Laser spot size, energy density, substrate temperature and deposition ambient (vacuum and oxygen) were varied. Comparison of growth rate, morphology, composition, crystallinity and adhesion of the films grown by subpicosecond and nanosecond deposition is presented. (C) 2002 Elsevier Science B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
