4.2 Article

Plasma-enhanced chemical vapor deposition of multiwalled carbon nanofibers

Journal

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 2, Issue 5, Pages 475-480

Publisher

AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/jnn.2002.133

Keywords

carbon nanotubes; multiwall; vertical alignment; plasma deposition; tip growth; nanodevice fabrication

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Plasma-enhanced chemical vapor deposition is used to grow vertically aligned multiwalled carbon nanofibers (MWNFs). The graphite basal planes in these nanofibers are not parallel as in nanotubes; instead they exhibit a small angle resembling a stacked cone arrangement. A parametric study with varying process parameters such as growth temperature, feedstock composition, and substrate power has been conducted, and these parameters are found to influence the growth rate, diameter, and morphology. The well-aligned MWNFs are suitable for fabricating electrode systems in sensor and device development.

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