Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume 41, Issue 10B, Pages L1178-L1180Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.41.L1178
Keywords
AFM; SKPM; noncontact; atom-resolved image; Si(111); contrast inversion
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Si (111) 7 x 7 surfaces were observed at an atomic scale by noncontact atomic force microscope (neAFM) and scanning Kelvin probe microscopy (SKPM). A vacancy at the Si Surface was resolved by both ncAFM and SUM, This indicates that SKPM, as well as ncAFM, has a true atomic-scale lateral resolution. In the atom-resolved SKPM observations, two types of contrast were acquired even when the observation conditions were the same except for the surface condition of a cantilever tip. The result experimentally revealed that the contrast of all atom-resolved SKPM image strongly depended on the surface condition of the probe tip.
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