High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers

We describe a transfer printing technique for directly patterning thin gold films onto GaAs surfaces. This additive transfer process is mediated by the presence of an alkane dithiol monolayer on the wafer surface. The transferred patterns are chemically bound to the wafer surface and they exhibit strong adhesion (i.e., they easily pass Scotch tape adhesion tests.) A variety of gold patterns with a wide range of feature sizes can be printed onto GaAs (100), (110), (211)A, and (211)B using this approach. (C) 2002 American Vacuum Society.