Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams

A line of periodic dot structure with an interval of 6.25 mum on a gold thin film was fabricated with a single shot of interfered femtosecond laser beams split by a diffraction beam splitter. The total length of the structure was 6 mm. In addition, dot matrix and comb structures were fabricated with transportation of samples at an arbitrary speed during the process. The samples worked as transmission and reflection gratings. In addition, nanowires were fabricated by peeling the comb structure, of which the thickness was 200 nm. (C) 2002 American Institute of Physics.