4.6 Article Proceedings Paper

Integrated microwave sensors for cavity-length measurement in machine engineering

Journal

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
Volume 50, Issue 12, Pages 3070-3076

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMTT.2002.805148

Keywords

algorithms; intelligent sensors; length measurement; mechanical variables measurement; microwave measurements; MODFET integrated circuits; position measurement; real-time systems

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A novel measurement procedure using microwaves is presented. The implemented sensor prototype determines the length of a cylindrical cavity (e.g., a hydraulic system) with submillimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.

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