Breakdown of the approximations of small perturbations in continuum modeling of amorphous thin film growth

Morphology evolution of thin film growth can be quantitatively modeled by employing rate equations for two-dimensional, single-valued functions within a treatment of small perturbations. This description can be expected to be valid in an intermediate film thickness regime, where substrate influences and three-dimensional effects are minor. The breakdown of. the mathematical description in its upper film thickness limit is systematically investigated by a detailed comparison of experiments and simulation. Possible reasons for the failure are discussed and improvements are suggested. (C) 2002 American Institute of Physics. [DOI: 10.1063/1.153551].