Patterned low temperature copper-rich deposits using inkjet printing

A PZT piezoelectric ceramic research drop-on-demand inkjet print head operating in bend made was used as a means of delivering a copper precursor, vitiyltrimethylsilane copper (+ 1) hexafluoroacetylacetonate, in a controlled and placement accurate fashion. The reagent disproportionates at low temperature (< 200 degrees C), to deposit copper on glass. These deposits are shown to be more than 90% copper by weight by electron probe microanalysis and microbeam Rutherford backscattering spectroscopy. Microscopy shows a deposit diameter and three-dimensional profile that suggests a complex deposition and conversion mechanism. Our findings represent an important step towards the manufacture of electronic devices by entirely nonlithographic means. (C) 2002 American Institute of Physics.