☆ 4.7 Article Proceedings Paper

Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe

APPLIED SURFACE SCIENCE (2003)

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Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe

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