Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume 42, Issue 2B, Pages L189-L191Publisher
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.42.L189
Keywords
surface X-ray diffraction; integral order rod; holography; fourier transform; electron density; three-dimensional images
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We have developed a method of determining directly the structure of surfaces and interfaces as three-dimensional images using X-ray diffraction. The intensity profile along an integral order rod is interpreted as an interference pattern between scattered waves from a substrate whose structure is already known and from surface layers whose structure is the target of investigation. This mechanism is the same as that of holography and has a potentiality to reconstruct electron density. Atomic images of Ge in a-Si/Ge/Si(001) have been obtained by this method.
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