A Monte Carlo program for quantitative electron-induced X-ray analysis of individual particles

A versatile Monte Carlo program for quantitative particle analysis in electron probe X-ray microanalysis is presented. The program includes routines for simulating electron-solid interactions in microparticles lying on a flat surface and calculating the generated X-ray signal. Simulation of the whole X-ray spectrum as well as phi(z) curves is possible. The most important facility of the program is the reverse Monte Carlo quantification of the chemical composition of microparticles, including low-Z elements, such as C, N, O, and F. This quantification method is based on the combination of a single scattering Monte Carlo simulation and a robust successive approximation. An iteration procedure is employed; in each iteration step, the Monte Carlo simulation program calculates characteristic X-ray intensities, and a new set of concentration values for chemical elements in the particle is determined. When the simulated X-ray intensities converge to the measured ones, the input values of elemental concentrations used for the simulation are determined as chemical compositions of the particle. This quantification procedure was evaluated by investigating various types of standard particles, and good accuracy of the methodology was demonstrated. A methodology for heterogeneity assessment of single particles is also described.