Journal
JOURNAL OF APPLIED PHYSICS
Volume 93, Issue 5, Pages 2719-2722Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1542935
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The relationship between nitrogen content and interface trap density (D-it) in SiO2/4H-SiC near the conduction band has been quantitatively determined. Nitridation using NO significantly reduces D-it near the conduction band, but the effect saturates after approximate to2.5x10(14) cm(-2) of nitrogen. These results are consistent with a model of the interface in which defects such as carbon clusters or silicon suboxide states produce traps with energies corresponding to the sizes of the defects. Nitrogen passivation results in the dissolution of the defects, which then lowers the energies of the traps in the band gap. (C) 2003 American Institute of Physics.
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