Journal
APPLIED PHYSICS LETTERS
Volume 82, Issue 10, Pages 1559-1561Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1559418
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Dangling bonds and surface states are inherent to semiconductor surfaces. By passivating dangling bonds on the silicon (001) surface with a monolayer of selenium, surface states are removed from the band gap. Magnesium contacts on selenium-passivated silicon (001) behave ohmically, as expected from the work function of magnesium and the electron affinity of silicon. After rapid thermal annealing and hot-plate annealing, magnesium contacts on selenium-passivated silicon (001) show better thermal stability than on hydrogen-passivated silicon (001), which is attributed to the suppression of silicide formation by selenium passivation. (C) 2003 American Institute of Physics.
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