Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 104, Issue 1, Pages 6-10Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(02)00434-X
Keywords
micropumps; microfluidics; peristaltic; PDMS; microfabrication
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We demonstrate a discrete, two-stage peristaltic micropump for applications in microfluidics. Prototypes are fabricated in polydimethylsiloxane (PDMS) with water as the working fluid. Off-wafer compressed nitrogen gas provides the actuation energy. The device may be operated in three- or two-stage modes for direct comparison. We show that two-stage pumps have comparable flow rates to the three-stage counterparts, and produce similar to2/3 the static head. Our results suggest that two-stage pumps may be a viable choice under low backpressure conditions where available on-chip area or the number of external connections is limited. (C) 2002 Elsevier Science B.V. All rights reserved.
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