Journal
APPLIED PHYSICS LETTERS
Volume 82, Issue 11, Pages 1685-1687Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1560867
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Spectral emittance and thermal stability of two-dimensional W gratings are investigated to obtain high-temperature resistive selective emitters. Numerical calculations based on rigorous coupled-wave analysis are performed to determine the structural profile of gratings with good spectral selectivity. According to the determined parameters, two-dimensional W gratings composed of rectangular microcavities with the period of 1.0 mum are fabricated on single crystalline and polycrystalline W substrates. The grating shows a strong emission peak which can be explained by the confined modes inside the cavities. The grating with 200 nm wall thickness made from a single crystalline W shows very high thermal stability over 1400 K, while the polycrystalline grating is deformed at a high temperature because of the grain growth. (C) 2003 American Institute of Physics.
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