Journal
MICROELECTRONIC ENGINEERING
Volume 66, Issue 1-4, Pages 77-82Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(03)00028-5
Keywords
nanostructures; chemical vapor deposition processes; fullerenes
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An economical synthesis method for carbon nanotubes in large quantity using dispersion of nano metal powders and magnetic fluid as catalysts is developed. In CVD synthesis on plain substrates, the usually employed metal deposition process and the finite substrate area limit the use of the method for mass production. These restrictions are overcome by employing spin-coating of nanoparticles on a bunch of substrates. Ni nano powders and magnetic fluids mixed in polyvinyl alcohol have been successfully applied on various substrates for synthesis of carbon nanotubes. The carbon nanotubes grown on Si and alumina showed a good morphology of dense distribution of vertically aligned tubes similar to what has been shown in CVD growth with conventionally deposited catalyst metal films. (C) 2003 Elsevier Science B.V. All rights reserved.
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