Journal
MICROELECTRONIC ENGINEERING
Volume 66, Issue 1-4, Pages 166-170Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(03)00042-X
Keywords
AAO template; pore-widening time; AFM
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In this paper, anodic aluminum oxide (AAO) templates were fabricated using a two-step oxidization method, pore-widening was then fulfilled in 5 wt% phosphoric acid at 37 degreesC. The AAO template prepared under 40 V constant potential presents the optimum ordering. The pore diameter and spacing are proportional to the forming voltage, which is due to the alternative migration velocity of reactive ions under electric field according to the growth-dissolution model. Further pore adjustment depends on the time of pore-widening in phosphoric acid. The characterization of the AAO template was measured by atomic force microscopy (AFM) and X-ray diffraction (XRD). (C) 2003 Elsevier Science B.V. All rights reserved.
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