Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume 42, Issue 4B, Pages L435-L437Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.42.L435
Keywords
ozone sensors; oxide semiconductors; ZnO thin films; nanostructured oxides
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In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.
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